product

Test and measurement system

Scanning Laser Line Profiler & Imaging Scope

[Feature]: · No contact inspection by laser.
· Being able to inspect by 0.1nm for a mirror surface. 0.1µm for a rough surface
· Be strong against shaking (it doesn't need an installation against shaking), because of high speedy scanning(0.52msec/30mm/1 line)
· Being able to scan a big area, 30×30mm
[Measuring for]: · A mirror surface such as a semiconductor Wafer, a hard disk and a LCD flat panel, or a sputtering surface of metal and a high molecule material.
· A rough surface such as "a copy drum".
[Dimensions of device]: W550×D600×H600

[Measurement sample]: 1.Specular

1-1 Example data of a Hard Disk

1-2 Analysis Data of a hard disk

1-3 Example data of Si wafer

1-4 Analysis data of a Si wafer

1-5 Example data of Silicon Wafer

1-6 A surface of semiconductor pattern; 2.Roughened surface
Evaluation (2D measurement) of aluminium source Cda ( copy drum / lathe processed goods )

2-1 Quality product

2-2 Devective product